Understanding dose correction for high-resolution 50 kV electron-beam lithography on thick resist layers - ScienceDirect
Enhancing materials for hi-res patterning to advance microelectronics
Direct laser writing lithography using a negative-tone electron-beam resist
High speed e-beam writing for large area photonic nanostructures — a choice of parameters | Scientific Reports
Electron beam lithography - LNF Wiki
Plasma-assisted filling electron beam lithography for high throughput patterning of large area closed polygon nanostructures - Nanoscale (RSC Publishing)
Electron Beam Lithography – Wisconsin Centers for Nanoscale Technology – UW–Madison
Development of massively parallel electron beam direct write lithography using active-matrix nanocrystalline-silicon electron emitter arrays | Microsystems & Nanoengineering
Cr pattern created by electron beam lithography with PMMA resist... | Download Scientific Diagram
Reflective electron beam lithography: A maskless ebeam direct write lithography approach using the reflective electron beam lithography concept: Journal of Vacuum Science & Technology B: Vol 28, No 6
Direct X-ray and electron-beam lithography of halogenated zeolitic imidazolate frameworks | Nature Materials
Electron beam lithography (EBL) for fabrication of nano-hole arrays | Download Scientific Diagram
Direct Wavelength-Selective Optical and Electron-Beam Lithography of Functional Inorganic Nanomaterials | ACS Nano
Micromachines | Free Full-Text | Room Temperature Direct Electron Beam Lithography in a Condensed Copper Carboxylate
Direct Patterning of Zinc Sulfide on a Sub-10 Nanometer Scale via Electron Beam Lithography | ACS Nano
.jpg "Nanofabrication Using Electron Beam Lithography (EBL)")
Nanofabrication Using Electron Beam Lithography (EBL)
Electron Optical Lithography - an overview | ScienceDirect Topics
Concept of Electron Beam Direct Writing (EBDW) equipment with Character... | Download Scientific Diagram
Lithography
Electron-beam lithography - Wikipedia
Nature Materials! Exploring direct X-ray and electron-beam lithography of halogenated zeolitic imidazolate frameworks - Lehrstuhl für Anorganische und Metallorganische Chemie
Nanomaterials | Free Full-Text | Evolution in Lithography Techniques: Microlithography to Nanolithography
